Cycle 0:C:\Messungen\Sebastian Benz\20210907_Iod\Temp20210907_SBenz.117.Ta-At-3.1_1.pro:1:8:20210907_SBenz.Ta-At-3.1:O 1s 10
	Characteristic Energy eV	1.486600e+003	Acquisition Time s	6.000000e+000
Name		O 1s	O 1s	
Position		532.03	530.58	
FWHM		2.52	1.21	
Area		2720.09	1595.15	
Lineshape		GL(30)	GL(30)	
K.E.	Counts	O 1s	O 1s	Background	Envelope		B.E.	CPS	O 1s	O 1s	Background CPS	Envelope CPS
9.432000e+002	1.078200e+004	1.078200e+004	1.078200e+004	1.078200e+004	1.078200e+004		5.434000e+002	1.797000e+003	1.797000e+003	1.797000e+003	1.797000e+003	1.797000e+003
9.434000e+002	1.080500e+004	1.080500e+004	1.080500e+004	1.080500e+004	1.080500e+004		5.432000e+002	1.800833e+003	1.800833e+003	1.800833e+003	1.800833e+003	1.800833e+003
9.436000e+002	1.076000e+004	1.076000e+004	1.076000e+004	1.076000e+004	1.076000e+004		5.430000e+002	1.793333e+003	1.793333e+003	1.793333e+003	1.793333e+003	1.793333e+003
9.438000e+002	1.074900e+004	1.074900e+004	1.074900e+004	1.074900e+004	1.074900e+004		5.428000e+002	1.791500e+003	1.791500e+003	1.791500e+003	1.791500e+003	1.791500e+003
9.440000e+002	1.059400e+004	1.059400e+004	1.059400e+004	1.059400e+004	1.059400e+004		5.426000e+002	1.765667e+003	1.765667e+003	1.765667e+003	1.765667e+003	1.765667e+003
9.442000e+002	1.074400e+004	1.074400e+004	1.074400e+004	1.074400e+004	1.074400e+004		5.424000e+002	1.790667e+003	1.790667e+003	1.790667e+003	1.790667e+003	1.790667e+003
9.444000e+002	1.072100e+004	1.072100e+004	1.072100e+004	1.072100e+004	1.072100e+004		5.422000e+002	1.786833e+003	1.786833e+003	1.786833e+003	1.786833e+003	1.786833e+003
9.446000e+002	1.054600e+004	1.054600e+004	1.054600e+004	1.054600e+004	1.054600e+004		5.420000e+002	1.757667e+003	1.757667e+003	1.757667e+003	1.757667e+003	1.757667e+003
9.448000e+002	1.047500e+004	1.047500e+004	1.047500e+004	1.047500e+004	1.047500e+004		5.418000e+002	1.745833e+003	1.745833e+003	1.745833e+003	1.745833e+003	1.745833e+003
9.450000e+002	1.048200e+004	1.048200e+004	1.048200e+004	1.048200e+004	1.048200e+004		5.416000e+002	1.747000e+003	1.747000e+003	1.747000e+003	1.747000e+003	1.747000e+003
9.452000e+002	1.052700e+004	1.052700e+004	1.052700e+004	1.052700e+004	1.052700e+004		5.414000e+002	1.754500e+003	1.754500e+003	1.754500e+003	1.754500e+003	1.754500e+003
9.454000e+002	1.064300e+004	1.064300e+004	1.064300e+004	1.064300e+004	1.064300e+004		5.412000e+002	1.773833e+003	1.773833e+003	1.773833e+003	1.773833e+003	1.773833e+003
9.456000e+002	1.053200e+004	1.053200e+004	1.053200e+004	1.053200e+004	1.053200e+004		5.410000e+002	1.755333e+003	1.755333e+003	1.755333e+003	1.755333e+003	1.755333e+003
9.458000e+002	1.052500e+004	1.052500e+004	1.052500e+004	1.052500e+004	1.052500e+004		5.408000e+002	1.754167e+003	1.754167e+003	1.754167e+003	1.754167e+003	1.754167e+003
9.460000e+002	1.049700e+004	1.049700e+004	1.049700e+004	1.049700e+004	1.049700e+004		5.406000e+002	1.749500e+003	1.749500e+003	1.749500e+003	1.749500e+003	1.749500e+003
9.462000e+002	1.050500e+004	1.050500e+004	1.050500e+004	1.050500e+004	1.050500e+004		5.404000e+002	1.750833e+003	1.750833e+003	1.750833e+003	1.750833e+003	1.750833e+003
9.464000e+002	1.060800e+004	1.060800e+004	1.060800e+004	1.060800e+004	1.060800e+004		5.402000e+002	1.768000e+003	1.768000e+003	1.768000e+003	1.768000e+003	1.768000e+003
9.466000e+002	1.040300e+004	1.040300e+004	1.040300e+004	1.040300e+004	1.040300e+004		5.400000e+002	1.733833e+003	1.733833e+003	1.733833e+003	1.733833e+003	1.733833e+003
9.468000e+002	1.035500e+004	1.035500e+004	1.035500e+004	1.035500e+004	1.035500e+004		5.398000e+002	1.725833e+003	1.725833e+003	1.725833e+003	1.725833e+003	1.725833e+003
9.470000e+002	1.042400e+004	1.042400e+004	1.042400e+004	1.042400e+004	1.042400e+004		5.396000e+002	1.737333e+003	1.737333e+003	1.737333e+003	1.737333e+003	1.737333e+003
9.472000e+002	1.045000e+004	1.045000e+004	1.045000e+004	1.045000e+004	1.045000e+004		5.394000e+002	1.741667e+003	1.741667e+003	1.741667e+003	1.741667e+003	1.741667e+003
9.474000e+002	1.027700e+004	1.027700e+004	1.027700e+004	1.027700e+004	1.027700e+004		5.392000e+002	1.712833e+003	1.712833e+003	1.712833e+003	1.712833e+003	1.712833e+003
9.476000e+002	1.048900e+004	1.048900e+004	1.048900e+004	1.048900e+004	1.048900e+004		5.390000e+002	1.748167e+003	1.748167e+003	1.748167e+003	1.748167e+003	1.748167e+003
9.478000e+002	1.031500e+004	1.031500e+004	1.031500e+004	1.031500e+004	1.031500e+004		5.388000e+002	1.719167e+003	1.719167e+003	1.719167e+003	1.719167e+003	1.719167e+003
9.480000e+002	1.029500e+004	1.029500e+004	1.029500e+004	1.029500e+004	1.029500e+004		5.386000e+002	1.715833e+003	1.715834e+003	1.715833e+003	1.715833e+003	1.715834e+003
9.482000e+002	1.035700e+004	1.035701e+004	1.035700e+004	1.035700e+004	1.035701e+004		5.384000e+002	1.726167e+003	1.726168e+003	1.726167e+003	1.726167e+003	1.726168e+003
9.484000e+002	1.037500e+004	1.037502e+004	1.037500e+004	1.037500e+004	1.037502e+004		5.382000e+002	1.729167e+003	1.729170e+003	1.729167e+003	1.729167e+003	1.729170e+003
9.486000e+002	1.043400e+004	1.043404e+004	1.043400e+004	1.043400e+004	1.043404e+004		5.380000e+002	1.739000e+003	1.739006e+003	1.739000e+003	1.739000e+003	1.739006e+003
9.488000e+002	1.028000e+004	1.028007e+004	1.028000e+004	1.028000e+004	1.028007e+004		5.378000e+002	1.713333e+003	1.713346e+003	1.713333e+003	1.713333e+003	1.713346e+003
9.490000e+002	1.026500e+004	1.026515e+004	1.026500e+004	1.026500e+004	1.026515e+004		5.376000e+002	1.710833e+003	1.710858e+003	1.710833e+003	1.710833e+003	1.710858e+003
9.492000e+002	1.027600e+004	1.027629e+004	1.027600e+004	1.027600e+004	1.027629e+004		5.374000e+002	1.712667e+003	1.712715e+003	1.712667e+003	1.712667e+003	1.712715e+003
9.494000e+002	1.021400e+004	1.021456e+004	1.021400e+004	1.021400e+004	1.021456e+004		5.372000e+002	1.702333e+003	1.702427e+003	1.702333e+003	1.702333e+003	1.702427e+003
9.496000e+002	1.031400e+004	1.031506e+004	1.031400e+004	1.031400e+004	1.031506e+004		5.370000e+002	1.719000e+003	1.719177e+003	1.719000e+003	1.719000e+003	1.719177e+003
9.498000e+002	1.016800e+004	1.016997e+004	1.016800e+004	1.016800e+004	1.016997e+004		5.368000e+002	1.694667e+003	1.694995e+003	1.694667e+003	1.694667e+003	1.694995e+003
9.500000e+002	1.005600e+004	1.005957e+004	1.005600e+004	1.005600e+004	1.005957e+004		5.366000e+002	1.676000e+003	1.676595e+003	1.676000e+003	1.676000e+003	1.676595e+003
9.502000e+002	1.013000e+004	1.013634e+004	1.013000e+004	1.013000e+004	1.013634e+004		5.364000e+002	1.688333e+003	1.689390e+003	1.688333e+003	1.688333e+003	1.689390e+003
9.504000e+002	1.038600e+004	1.039702e+004	1.038600e+004	1.038600e+004	1.039702e+004		5.362000e+002	1.731000e+003	1.732836e+003	1.731000e+003	1.731000e+003	1.732836e+003
9.506000e+002	1.006600e+004	1.008475e+004	1.006600e+004	1.006600e+004	1.008475e+004		5.360000e+002	1.677667e+003	1.680792e+003	1.677667e+003	1.677667e+003	1.680792e+003
9.508000e+002	1.017700e+004	1.020826e+004	1.017700e+004	1.017700e+004	1.020826e+004		5.358000e+002	1.696167e+003	1.701377e+003	1.696167e+003	1.696167e+003	1.701377e+003
9.510000e+002	1.021600e+004	1.026704e+004	1.021600e+004	1.021600e+004	1.026704e+004		5.356000e+002	1.702667e+003	1.711174e+003	1.702667e+003	1.702667e+003	1.711174e+003
9.512000e+002	1.002600e+004	1.010761e+004	1.002600e+004	1.002600e+004	1.010761e+004		5.354000e+002	1.671000e+003	1.684601e+003	1.671000e+003	1.671000e+003	1.684601e+003
9.514000e+002	1.008700e+004	1.026269e+004	1.013493e+004	1.013493e+004	1.026269e+004		5.352000e+002	1.681167e+003	1.710449e+003	1.689156e+003	1.689156e+003	1.710449e+003
9.516000e+002	1.029200e+004	1.033053e+004	1.013472e+004	1.013472e+004	1.033053e+004		5.350000e+002	1.715333e+003	1.721755e+003	1.689120e+003	1.689120e+003	1.721755e+003
9.518000e+002	1.049300e+004	1.042799e+004	1.013423e+004	1.013423e+004	1.042799e+004		5.348000e+002	1.748833e+003	1.737998e+003	1.689038e+003	1.689038e+003	1.737998e+003
9.520000e+002	1.050700e+004	1.056496e+004	1.013372e+004	1.013372e+004	1.056496e+004		5.346000e+002	1.751167e+003	1.760827e+003	1.688953e+003	1.688953e+003	1.760827e+003
9.522000e+002	1.063800e+004	1.075227e+004	1.013303e+004	1.013303e+004	1.075227e+004		5.344000e+002	1.773000e+003	1.792045e+003	1.688838e+003	1.688838e+003	1.792045e+003
9.524000e+002	1.103400e+004	1.100112e+004	1.013180e+004	1.013180e+004	1.100112e+004		5.342000e+002	1.839000e+003	1.833519e+003	1.688633e+003	1.688633e+003	1.833519e+003
9.526000e+002	1.147200e+004	1.132226e+004	1.012996e+004	1.012996e+004	1.132226e+004		5.340000e+002	1.912000e+003	1.887043e+003	1.688327e+003	1.688327e+003	1.887043e+003
9.528000e+002	1.192800e+004	1.172390e+004	1.012751e+004	1.012750e+004	1.172390e+004		5.338000e+002	1.988000e+003	1.953983e+003	1.687918e+003	1.687917e+003	1.953984e+003
9.530000e+002	1.221000e+004	1.220922e+004	1.012467e+004	1.012465e+004	1.220923e+004		5.336000e+002	2.035000e+003	2.034870e+003	1.687445e+003	1.687442e+003	2.034872e+003
9.532000e+002	1.283600e+004	1.277163e+004	1.012101e+004	1.012095e+004	1.277169e+004		5.334000e+002	2.139333e+003	2.128605e+003	1.686834e+003	1.686824e+003	2.128615e+003
9.534000e+002	1.321000e+004	1.339430e+004	1.011698e+004	1.011672e+004	1.339455e+004		5.332000e+002	2.201667e+003	2.232383e+003	1.686163e+003	1.686120e+003	2.232426e+003
9.536000e+002	1.387400e+004	1.404633e+004	1.011259e+004	1.011158e+004	1.404734e+004		5.330000e+002	2.312333e+003	2.341055e+003	1.685431e+003	1.685263e+003	2.341223e+003
9.538000e+002	1.476400e+004	1.468381e+004	1.010884e+004	1.010521e+004	1.468744e+004		5.328000e+002	2.460667e+003	2.447302e+003	1.684807e+003	1.684202e+003	2.447906e+003
9.540000e+002	1.530100e+004	1.525380e+004	1.010997e+004	1.009811e+004	1.526566e+004		5.326000e+002	2.550167e+003	2.542300e+003	1.684994e+003	1.683018e+003	2.544277e+003
9.542000e+002	1.563000e+004	1.570023e+004	1.012593e+004	1.009054e+004	1.573562e+004		5.324000e+002	2.605000e+003	2.616705e+003	1.687655e+003	1.681756e+003	2.622603e+003
9.544000e+002	1.616800e+004	1.597307e+004	1.017906e+004	1.008222e+004	1.606991e+004		5.322000e+002	2.694667e+003	2.662178e+003	1.696511e+003	1.680370e+003	2.678319e+003
9.546000e+002	1.642300e+004	1.603959e+004	1.031472e+004	1.007355e+004	1.628077e+004		5.320000e+002	2.737167e+003	2.673265e+003	1.719121e+003	1.678925e+003	2.713461e+003
9.548000e+002	1.644300e+004	1.589096e+004	1.061230e+004	1.006483e+004	1.643843e+004		5.318000e+002	2.740500e+003	2.648494e+003	1.768717e+003	1.677472e+003	2.739739e+003
9.550000e+002	1.650700e+004	1.554408e+004	1.118579e+004	1.005602e+004	1.667385e+004		5.316000e+002	2.751167e+003	2.590680e+003	1.864299e+003	1.676003e+003	2.778976e+003
9.552000e+002	1.707300e+004	1.503739e+004	1.214909e+004	1.004642e+004	1.714006e+004		5.314000e+002	2.845500e+003	2.506232e+003	2.024849e+003	1.674403e+003	2.856677e+003
9.554000e+002	1.810400e+004	1.442310e+004	1.353889e+004	1.003540e+004	1.792659e+004		5.312000e+002	3.017333e+003	2.403850e+003	2.256481e+003	1.672566e+003	2.987765e+003
9.556000e+002	1.885500e+004	1.375795e+004	1.518130e+004	1.002333e+004	1.891592e+004		5.310000e+002	3.142500e+003	2.292992e+003	2.530217e+003	1.670555e+003	3.152654e+003
9.558000e+002	1.975200e+004	1.309273e+004	1.662352e+004	1.001002e+004	1.970623e+004		5.308000e+002	3.292000e+003	2.182122e+003	2.770586e+003	1.668337e+003	3.284371e+003
9.560000e+002	1.967900e+004	1.246856e+004	1.728279e+004	9.996793e+003	1.975456e+004		5.306000e+002	3.279833e+003	2.078094e+003	2.880465e+003	1.666132e+003	3.292426e+003
9.562000e+002	1.875000e+004	1.191295e+004	1.684292e+004	9.984818e+003	1.877106e+004		5.304000e+002	3.125000e+003	1.985492e+003	2.807154e+003	1.664136e+003	3.128510e+003
9.564000e+002	1.706300e+004	1.144039e+004	1.551287e+004	9.975135e+003	1.697812e+004		5.302000e+002	2.843833e+003	1.906731e+003	2.585479e+003	1.662522e+003	2.829687e+003
9.566000e+002	1.495900e+004	1.105434e+004	1.384777e+004	9.968316e+003	1.493379e+004		5.300000e+002	2.493167e+003	1.842390e+003	2.307961e+003	1.661386e+003	2.488965e+003
9.568000e+002	1.305800e+004	1.075003e+004	1.235796e+004	9.964089e+003	1.314390e+004		5.298000e+002	2.176333e+003	1.791672e+003	2.059660e+003	1.660682e+003	2.190650e+003
9.570000e+002	1.180400e+004	1.051755e+004	1.127894e+004	9.961572e+003	1.183492e+004		5.296000e+002	1.967333e+003	1.752925e+003	1.879824e+003	1.660262e+003	1.972487e+003
9.572000e+002	1.108400e+004	1.034461e+004	1.061447e+004	9.960037e+003	1.099905e+004		5.294000e+002	1.847333e+003	1.724102e+003	1.769079e+003	1.660006e+003	1.833175e+003
9.574000e+002	1.050700e+004	1.021953e+004	1.025387e+004	9.959288e+003	1.051411e+004		5.292000e+002	1.751167e+003	1.703255e+003	1.708978e+003	1.659881e+003	1.752352e+003
9.576000e+002	1.029000e+004	1.013118e+004	1.007948e+004	9.958836e+003	1.025183e+004		5.290000e+002	1.715000e+003	1.688531e+003	1.679914e+003	1.659806e+003	1.708638e+003
9.578000e+002	1.000400e+004	1.007051e+004	1.000398e+004	9.958774e+003	1.011571e+004		5.288000e+002	1.667333e+003	1.678418e+003	1.667331e+003	1.659796e+003	1.685952e+003
9.580000e+002	9.966000e+003	1.002968e+004	9.974194e+003	9.958764e+003	1.004511e+004		5.286000e+002	1.661000e+003	1.671614e+003	1.662366e+003	1.659794e+003	1.674186e+003
9.582000e+002	9.947000e+003	1.000283e+004	9.963562e+003	9.958748e+003	1.000764e+004		5.284000e+002	1.657833e+003	1.667138e+003	1.660594e+003	1.659791e+003	1.667940e+003
9.584000e+002	9.899000e+003	9.985498e+003	9.960042e+003	9.958667e+003	9.986873e+003		5.282000e+002	1.649833e+003	1.664250e+003	1.660007e+003	1.659778e+003	1.664479e+003
9.586000e+002	1.003000e+004	1.004599e+004	1.003036e+004	1.003000e+004	1.004635e+004		5.280000e+002	1.671667e+003	1.674332e+003	1.671726e+003	1.671667e+003	1.674392e+003
9.588000e+002	1.003700e+004	1.004634e+004	1.003708e+004	1.003700e+004	1.004642e+004		5.278000e+002	1.672833e+003	1.674390e+003	1.672847e+003	1.672833e+003	1.674404e+003
9.590000e+002	1.005500e+004	1.006034e+004	1.005502e+004	1.005500e+004	1.006036e+004		5.276000e+002	1.675833e+003	1.676723e+003	1.675836e+003	1.675833e+003	1.676726e+003
9.592000e+002	9.841000e+003	9.843989e+003	9.841004e+003	9.841000e+003	9.843992e+003		5.274000e+002	1.640167e+003	1.640665e+003	1.640167e+003	1.640167e+003	1.640665e+003
9.594000e+002	9.884000e+003	9.885639e+003	9.884001e+003	9.884000e+003	9.885639e+003		5.272000e+002	1.647333e+003	1.647606e+003	1.647333e+003	1.647333e+003	1.647607e+003
9.596000e+002	9.829000e+003	9.829880e+003	9.829000e+003	9.829000e+003	9.829880e+003		5.270000e+002	1.638167e+003	1.638313e+003	1.638167e+003	1.638167e+003	1.638313e+003
9.598000e+002	9.956000e+003	9.956462e+003	9.956000e+003	9.956000e+003	9.956462e+003		5.268000e+002	1.659333e+003	1.659410e+003	1.659333e+003	1.659333e+003	1.659410e+003
9.600000e+002	9.830000e+003	9.830238e+003	9.830000e+003	9.830000e+003	9.830238e+003		5.266000e+002	1.638333e+003	1.638373e+003	1.638333e+003	1.638333e+003	1.638373e+003
9.602000e+002	9.885000e+003	9.885120e+003	9.885000e+003	9.885000e+003	9.885120e+003		5.264000e+002	1.647500e+003	1.647520e+003	1.647500e+003	1.647500e+003	1.647520e+003
9.604000e+002	9.735000e+003	9.735059e+003	9.735000e+003	9.735000e+003	9.735059e+003		5.262000e+002	1.622500e+003	1.622510e+003	1.622500e+003	1.622500e+003	1.622510e+003
9.606000e+002	9.921000e+003	9.921029e+003	9.921000e+003	9.921000e+003	9.921029e+003		5.260000e+002	1.653500e+003	1.653505e+003	1.653500e+003	1.653500e+003	1.653505e+003
9.608000e+002	9.996000e+003	9.996013e+003	9.996000e+003	9.996000e+003	9.996013e+003		5.258000e+002	1.666000e+003	1.666002e+003	1.666000e+003	1.666000e+003	1.666002e+003
9.610000e+002	9.757000e+003	9.757006e+003	9.757000e+003	9.757000e+003	9.757006e+003		5.256000e+002	1.626167e+003	1.626168e+003	1.626167e+003	1.626167e+003	1.626168e+003
9.612000e+002	9.734000e+003	9.734003e+003	9.734000e+003	9.734000e+003	9.734003e+003		5.254000e+002	1.622333e+003	1.622334e+003	1.622333e+003	1.622333e+003	1.622334e+003
9.614000e+002	9.790000e+003	9.790001e+003	9.790000e+003	9.790000e+003	9.790001e+003		5.252000e+002	1.631667e+003	1.631667e+003	1.631667e+003	1.631667e+003	1.631667e+003
9.616000e+002	9.938000e+003	9.938001e+003	9.938000e+003	9.938000e+003	9.938001e+003		5.250000e+002	1.656333e+003	1.656333e+003	1.656333e+003	1.656333e+003	1.656333e+003
9.618000e+002	9.880000e+003	9.880000e+003	9.880000e+003	9.880000e+003	9.880000e+003		5.248000e+002	1.646667e+003	1.646667e+003	1.646667e+003	1.646667e+003	1.646667e+003
9.620000e+002	9.903000e+003	9.903000e+003	9.903000e+003	9.903000e+003	9.903000e+003		5.246000e+002	1.650500e+003	1.650500e+003	1.650500e+003	1.650500e+003	1.650500e+003
9.622000e+002	9.854000e+003	9.854000e+003	9.854000e+003	9.854000e+003	9.854000e+003		5.244000e+002	1.642333e+003	1.642333e+003	1.642333e+003	1.642333e+003	1.642333e+003
9.624000e+002	9.827000e+003	9.827000e+003	9.827000e+003	9.827000e+003	9.827000e+003		5.242000e+002	1.637833e+003	1.637833e+003	1.637833e+003	1.637833e+003	1.637833e+003
9.626000e+002	9.856000e+003	9.856000e+003	9.856000e+003	9.856000e+003	9.856000e+003		5.240000e+002	1.642667e+003	1.642667e+003	1.642667e+003	1.642667e+003	1.642667e+003
9.628000e+002	9.754000e+003	9.754000e+003	9.754000e+003	9.754000e+003	9.754000e+003		5.238000e+002	1.625667e+003	1.625667e+003	1.625667e+003	1.625667e+003	1.625667e+003
9.630000e+002	9.821000e+003	9.821000e+003	9.821000e+003	9.821000e+003	9.821000e+003		5.236000e+002	1.636833e+003	1.636833e+003	1.636833e+003	1.636833e+003	1.636833e+003
9.632000e+002	1.009400e+004	1.009400e+004	1.009400e+004	1.009400e+004	1.009400e+004		5.234000e+002	1.682333e+003	1.682333e+003	1.682333e+003	1.682333e+003	1.682333e+003
